Development of High-Speed and High-Accuracy Electromagnetic Simulation Technology for RF Integrated Circuits

Electromagnetic simulation technology to extract effective material properties of metal dummy fills and lines is developed. Effective material properties are analyzed from propagation constant by considering a unit cell of the structure via eigenmode analysis. Measured and calculated frequency characteristic of reflection coefficient are compared for a 60 GHz band on-chip dipole antenna. It was confirmed that the calculated value agrees very well with the measured one when the effective material property of the dummy metal fills were considered. The proposed technique using effective material property enables high speed and accurate analysis of dummy metal fills in a CMOS chip.