Abstract
A system was developed to achieve consistent micro-tool production and work-piece processing. It consists of an ELID grinding system and measurement equipment on a plane in a precision 4-axis processing machine. This system allows production of tools with high accuracy, and deviation of the tool can be reduced to 30 nm. The surfaces of the produced micro-tools were investigated using advanced analytical methods. Fracture strength of the micro-tools was evaluated by nano-indentation testing, and their surface chemical properties were analyzed by XPS. The results suggest that the surface of processed micro-tools had been strengthened by penetration and diffusion of oxygen atoms into the material, and subsequent oxidation.
| Translated title of the contribution | Effects of on-machine tool production and micro-tool strengthening with surface modification |
|---|---|
| Original language | Japanese |
| Pages (from-to) | 99 - 104 |
| Journal | Journal of the Japan Society for Abrasive Technology |
| Volume | 53 |
| Issue number | 2 |
| DOIs | |
| State | Published - 1 Feb 2009 |