マイクロ切削に及ぼす機上工具作製の効果と表面改質によるマイクロツールの強靭化

A system was developed to achieve consistent micro-tool production and work-piece processing. It consists of an ELID grinding system and measurement equipment on a plane in a precision 4-axis processing machine. This system allows production of tools with high accuracy, and deviation of the tool can be reduced to 30 nm. The surfaces of the produced micro-tools were investigated using advanced analytical methods. Fracture strength of the micro-tools was evaluated by nano-indentation testing, and their surface chemical properties were analyzed by XPS. The results suggest that the surface of processed micro-tools had been strengthened by penetration and diffusion of oxygen atoms into the material, and subsequent oxidation.