| Original language | Japanese |
|---|---|
| Patent number | 特許第3654429号 |
| IPC | 特開2002-232069 |
| State | Published - 16 Aug 2002 |
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光半導体装置の製造方法
- 浅香 航太 (Inventor)
- , 伊賀 龍三 (Inventor)
- , 須崎 泰正 (Inventor)
- , Kota ASAKA (Inventor)
Research output: Patent