| Original language | Japanese |
|---|---|
| Patent number | 特許第3654429号 |
| IPC | 特開2002-232069 |
| State | Published - 16 Aug 2002 |
光半導体装置の製造方法
浅香 航太 (Inventor), 伊賀 龍三 (Inventor), 須崎 泰正 (Inventor), Kota ASAKA (Inventor)
Research output: Patent
浅香 航太 (Inventor), 伊賀 龍三 (Inventor), 須崎 泰正 (Inventor), Kota ASAKA (Inventor)
Research output: Patent
| Original language | Japanese |
|---|---|
| Patent number | 特許第3654429号 |
| IPC | 特開2002-232069 |
| State | Published - 16 Aug 2002 |