歪みSOI(sSOI)構造の熱的安定性

Translated title of the contribution: 歪みSOI(sSOI)構造の熱的安定性

福本敦之, 沢野憲太郎, Yusuke HOSHI, 吉見信, 白木靖寛

Research output: Contribution to journal › Misc

Translated title of the contribution	歪みSOI(sSOI)構造の熱的安定性
Original language	Japanese
Pages (from-to)	301 -
Journal	応用物理学会学術講演会講演予稿集
Volume	66th
Issue number	1
State	Published - 7 Sep 2005

Cite this

@article{a95ec1998ff94c10a4c115109c7d365a,

title = "歪みSOI(sSOI)構造の熱的安定性",

author = "福本敦之 and 沢野憲太郎 and Yusuke HOSHI and 吉見信 and 白木靖寛",

year = "2005",

month = sep,

day = "7",

language = "Japanese",

volume = "66th",

pages = "301 --",

journal = "応用物理学会学術講演会講演予稿集",

number = "1",

}

TY - JOUR

T1 - 歪みSOI(sSOI)構造の熱的安定性

AU - 福本敦之, null

AU - 沢野憲太郎, null

AU - HOSHI, Yusuke

AU - 吉見信, null

AU - 白木靖寛, null

PY - 2005/9/7

Y1 - 2005/9/7

UR - http://jglobal.jst.go.jp/public/200902220496978848

M3 - Misc

VL - 66th

SP - 301 -

JO - 応用物理学会学術講演会講演予稿集

JF - 応用物理学会学術講演会講演予稿集

IS - 1

ER -