| Original language | Japanese |
|---|---|
| State | Published - Mar 2016 |
| Event | 第63回応用物理学会春季学術講演会 - Duration: 19 Mar 2016 → … |
Conference
| Conference | 第63回応用物理学会春季学術講演会 |
|---|---|
| Period | 19/03/16 → … |
貼り合わせ法による一軸性歪みSiGe-on-Insulator(SGOI)の作製
松尾 拓哉, 澤野 憲太郎, Kentarou SAWANO
Research output: Contribution to conference › Presentation