銀薄膜構造の変化によるカーボンオニオン膜合成への影響

Effects of silver catalyst structure on synthesis of carbon onion film were investigated. Silver thin films were sputter-deposited on silicon wafers at several different temperatures, and then carbon ions were implanted into the film using a plasma based ion implantation (PBII) technique. The films were heated to evaporate silver component so that carbon material would remain on the wafers. The sample surfaces at each step were observed using scanning electron microscopy. We found crystal grains of the films become larger when the sputtering temperature is higher. Defects were found on grain boundary, which were considered sites of nucleation and growth of carbon nano particles (CNP). The CNP film synthesized in the silver film deposited at 350℃ consisted of CNPs whose diameter was around 10nm, while that was around 20nm when the deposition temperature was 150℃. The silver film deposited at 350℃ showed island structure, resulting in island-shape hull structure of CNP film.