Atomic-Scale Depth Profiling of Oxynitride/Si(100) Interface

Research output: Contribution to conferencePresentation

Original languageJapanese
StatePublished - 2002
EventInternational Semiconductor Technology Conference ISTC 2002 Meeting, Tokyo, Japan -
Duration: 1 Jan 2002 → …

Conference

ConferenceInternational Semiconductor Technology Conference ISTC 2002 Meeting, Tokyo, Japan
Period1/01/02 → …

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