Atomic Structure of SiO2 at SiO2/Si Interface

Translated title of the contribution: Atomic Structure of SiO2 at SiO2/Si Interface

K. Hirose, H. Nohira, K. Sakano, T. Hattori, Hiroshi NOHIRA

Research output: Contribution to journalMisc

Translated title of the contributionAtomic Structure of SiO2 at SiO2/Si Interface
Original languageJapanese
Pages (from-to)p. 128 -
JournalDefault journal
Volume041
StatePublished - 1999

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