| Original language | Japanese |
|---|---|
| State | Published - 2004 |
| Event | 日本材料学会第53期学術講演会 - Duration: 1 Jan 2004 → … |
Conference
| Conference | 日本材料学会第53期学術講演会 |
|---|---|
| Period | 1/01/04 → … |
Cu薄膜の真性応力におよぼす基板の表面エネルギーの影響
Research output: Contribution to conference › Presentation
Research output: Contribution to conference › Presentation
| Original language | Japanese |
|---|---|
| State | Published - 2004 |
| Event | 日本材料学会第53期学術講演会 - Duration: 1 Jan 2004 → … |
| Conference | 日本材料学会第53期学術講演会 |
|---|---|
| Period | 1/01/04 → … |