Depth Profiling of Oxynitride/Si(100) Interface using Synchrotron Radiation

Research output: Contribution to conferencePresentation

Original languageJapanese
StatePublished - 2002
Event4th Int. Symp. on Control of Semiconductor Interfaces, Karuizawa, Japan -
Duration: 1 Jan 2002 → …

Conference

Conference4th Int. Symp. on Control of Semiconductor Interfaces, Karuizawa, Japan
Period1/01/02 → …

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