| Translated title of the contribution | Diagnostics of oxygen-rare gas mixed plasmas excited by microwave discharge |
|---|---|
| Original language | Japanese |
| State | Published - 2009 |
| Event | The 6th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology - Duration: 1 Jan 2009 → … |
Conference
| Conference | The 6th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology |
|---|---|
| Period | 1/01/09 → … |