Ge/Si積層構造の結晶化プロセスとその課題

坂根健斗, 野秋元, 三谷祐一郎, Yuichiro MITANI

Research output: Contribution to conference › Presentation

Original language	Japanese
State	Published - 21 Sep 2022
Event	第83回応用物理学会秋季学術講演会 - Duration: 20 Sep 2022 → …

Conference	第83回応用物理学会秋季学術講演会
Period	20/09/22 → …

Cite this

@conference{773a1f93f0014f61a5a421af28fab5e9,

title = "Ge/Si積層構造の結晶化プロセスとその課題",

author = "\{坂根健斗\} and \{野秋元\} and \{三谷祐一郎\} and Yuichiro MITANI",

year = "2022",

month = sep,

day = "21",

language = "Japanese",

note = "第83回応用物理学会秋季学術講演会 ; Conference date: 20-09-2022",

}