Initial Stage of Oxidation of Hydrogen-Terminated Silicon Surfaces

Translated title of the contribution: Initial Stage of Oxidation of Hydrogen-Terminated Silicon Surfaces

T. Hattori, H. Nohira, K. Ohishi, Y. Shimizu, Y. Tamura, Hiroshi NOHIRA

Research output: Contribution to journalMisc

Translated title of the contributionInitial Stage of Oxidation of Hydrogen-Terminated Silicon Surfaces
Original languageJapanese
Pages (from-to)385 - 387
JournalDefault journal
StatePublished - 1994

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