Initial Stage of Oxidation of Hydrogen-Terminated Silicon Surface

K. Ohishi, H. Nohira, Y. Shimizu, Y. Tamura, T. Hattori, Hiroshi NOHIRA

Research output: Contribution to journalMisc

Original languageJapanese
Pages (from-to)603 - 605
JournalDefault journal
StatePublished - 1993

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