LSI製造における電気めっき制御槽のしゃへい板配置の最適化

Translated title of the contribution: Optimization of Sheild Location in Electroplating Control Cell for LSI Fabrication

安部勇仁, Yoshinao KISHIMOTO, 森田岳, 小林志好, 大塚年久

Research output: Contribution to conference › Presentation

Translated title of the contribution	Optimization of Sheild Location in Electroplating Control Cell for LSI Fabrication
Original language	Japanese
State	Published - Sep 2011
Event	Mechanical Engineering Congress, 2011 Japan - Duration: 1 Sep 2011 → …

Conference	Mechanical Engineering Congress, 2011 Japan
Period	1/09/11 → …

Cite this

@conference{9cb04074d87b40a287efdace5281d398,

title = "LSI製造における電気めっき制御槽のしゃへい板配置の最適化",

author = "安部勇仁 and Yoshinao KISHIMOTO and 森田岳 and 小林志好 and 大塚年久",

year = "2011",

month = sep,

language = "Japanese",

note = "日本機械学会 2011年度年次大会 ; Conference date: 01-09-2011",

}