| Translated title of the contribution | Optical Emission Spectroscopy and Double Probe Measurement of Microwave Nitrogen-Rare Gas Discharge Plasma |
|---|---|
| Original language | Japanese |
| State | Published - 2009 |
| Event | oint Technical Meeting on Plasma Science and Technology, Pulsed Power Technology and Electrical Discharges, IEE Japan - Duration: 1 Jan 2009 → … |
Conference
| Conference | oint Technical Meeting on Plasma Science and Technology, Pulsed Power Technology and Electrical Discharges, IEE Japan |
|---|---|
| Period | 1/01/09 → … |