| Translated title of the contribution | Development of High Positional Resolution Pressure Wave Detection Sensor using PZT-MEMS |
|---|---|
| Original language | Japanese |
| Pages (from-to) | - |
| Journal | 電気学会全国大会講演論文集(CD-ROM) |
| Volume | 2020 |
| State | Published - 2020 |
PZT-MEMSを用いた高分解能圧力波検出センサの開発
小林史也, 小原昌悟, 三宅弘晃, Yasuhiro TANAKA, 神田健介
Research output: Contribution to journal › Misc