Residual Stress Measurements on Cu Thin Films with Various Thicknesses Using Synchrotron Radiation

Translated title of the contribution: Residual Stress Measurements on Cu Thin Films with Various Thicknesses Using Synchrotron Radiation

M. Kumagai, K. Akita, S. Ohya, E. Kusano, Y. Hagiwara, Masayoshi KUMAGAI

Research output: Contribution to journal › Misc

Translated title of the contribution	Residual Stress Measurements on Cu Thin Films with Various Thicknesses Using Synchrotron Radiation
Original language	Japanese
Pages (from-to)	- -
Journal	Default journal
Volume	CDROM
State	Published - 2003

Cite this

@article{3bb403eeb9f2439da8e7a4442c396710,

title = "Residual Stress Measurements on Cu Thin Films with Various Thicknesses Using Synchrotron Radiation",

author = "\{M. Kumagai\} and \{K. Akita\} and \{S. Ohya\} and \{E. Kusano\} and \{Y. Hagiwara\} and Masayoshi KUMAGAI",

year = "2003",

language = "Japanese",

volume = "CDROM",

pages = "-- --",

journal = "Default journal",

publisher = "The University of Tokyo Press",

}