Strain relaxation and surface morphology of new type thin SiGe virtual substrates

Translated title of the contribution: Strain relaxation and surface morphology of new type thin SiGe virtual substrates

ミロノフマクシム, Kentarou SAWANO, 白木靖寛

Research output: Contribution to conference › Presentation

Translated title of the contribution	Strain relaxation and surface morphology of new type thin SiGe virtual substrates
Original language	Japanese
State	Published - Sep 2005
Event	第66回応用物理学会学術講演会 - Duration: 7 Sep 2005 → …

Conference	第66回応用物理学会学術講演会
Period	7/09/05 → …

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