Suppression of segregation in P delta doping for ultrashallow Ohmic contact on n-type Ge

Michihiro Yamada, Kentarou Sawano, Kohei. M. Itoh, Kentarou SAWANO

Research output: Contribution to conference › Presentation

Translated title of the contribution	Suppression of segregation in P delta doping for ultrashallow Ohmic contact on n-type Ge
Original language	American English
State	Published - Sep 2014
Event	18th International Conference on Molecular Beam Epitaxy, Flagstaff - Duration: 7 Sep 2014 → …

Conference	18th International Conference on Molecular Beam Epitaxy, Flagstaff
Period	7/09/14 → …

Cite this

@conference{7b306e1b31b04fac91784230a23d1882,

title = "Suppression of segregation in P delta doping for ultrashallow Ohmic contact on n-type Ge",

author = "\{Michihiro Yamada\} and \{Kentarou Sawano\} and \{Kohei. M. Itoh\} and Kentarou SAWANO",

year = "2014",

month = sep,

language = "American English",

note = "18th International Conference on Molecular Beam Epitaxy, Flagstaff ; Conference date: 07-09-2014",

}