X-ray photoelectron spectroscopy study on dielectric properties at gate insulator film/Si interfaces

K. Hirose, H. Nohira, D. Kobayashi, T. Hattori, Hiroshi NOHIRA

Research output: Contribution to conferencePresentation

Original languageJapanese
StatePublished - 2006
Eventconference -
Duration: 1 Jan 2010 → …

Conference

Conferenceconference
Period1/01/10 → …

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